Wednesday, November 8, 2017: 3:30 PM-5:10 PM
Ballroom C (Pasadena Convention Center)
Dr. Tom Schamp, Hitachi High Technologies, America and Dr. Yu Zhu, IBM TJ Watson Research Center
3:55 PM
Automated end-point detection and targeted Ar+ milling of an advanced integrated circuit FIB TEM specimens
Dr. Cecile S. Bonifacio, E.A. Fischione Instruments, Inc.;
Dr. Pawel Nowakowski, E.A. Fischione Instruments, Inc.;
Dr. Michael J. Campin, E.A. Fischione Instruments, Inc.;
Mr. Jeremy T. Harbaugh, E.A. Fischione Instruments, Inc.;
Mr. Michael F. Boccabella, E.A. Fischione Instruments, Inc.;
Mr. Paul Fischione, E.A. Fischione Instruments, Inc.
4:45 PM
Automated Energy Dispersive X-ray Spectroscopy (EDS) for Metrology on Semiconductor Devices
Dr. Justin Roller, ThermoFisher Scientific (formerly FEI);
Dr. Zhenxin Zhong, ThermoFisher Scientific (formerly FEI);
Mr. Michael Strauss, ThermoFisher Scientific (formerly FEI);
Oleksii Bidiuk, ThermoFisher Scientific (formerly FEI);
Mr. Jeff Blackwood, Thermo Fisher Scientific;
Dr. Martin Verheijen, ThermoFisher Scientific (formerly FEI);
Dr. Ozan Ugurlu, ThermoFisher Scientific (formerly FEI);
Jason Donald, ThermoFisher Scientific (formerly FEI)
