Nanoprobing based EBAC technique from backside as well as frontside to isolate logic fails for otherwise non visual defects

Tuesday, November 7, 2017: 4:05 PM
Ballroom A (Pasadena Convention Center)
Mr. Sreenath Arva , GLOBALFOUNDRIES, Malta, NY
Mr. Satish Kodali , GLOBALFOUNDRIES, Malta, NY
Dr. Lucile C.Teague Sheridan, Ph.D. , GLOBALFOUNDRIES Inc., Malta, NY
Karthik Kalaiazhagan , GLOBALFOUNDRIES Inc., Malta, NY
Mr. Chong Khiam Oh , Globalfoundries Inc. Malta, NY USA, Malta, NY

See more of: Nanoprobing and Electrical Characterization II
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