SRAM PFET and NFET super FIN characterization
SRAM PFET and NFET super FIN characterization
Thursday, November 9, 2017: 11:30 AM
Ballroom A (Pasadena Convention Center)
Summary:
We report on how to take the advantage of complex analysis techniques in the root-cause searching of a fin related device failure. Scanning electron microscopy (SEM), plan-view and cross-section transmission electron microscopy (TEM) with energy dispersive X-ray spectroscopy (EDX), electron energy loss spectroscopy (EELS) and tomography are applied in the case study of a fin defect.
We report on how to take the advantage of complex analysis techniques in the root-cause searching of a fin related device failure. Scanning electron microscopy (SEM), plan-view and cross-section transmission electron microscopy (TEM) with energy dispersive X-ray spectroscopy (EDX), electron energy loss spectroscopy (EELS) and tomography are applied in the case study of a fin defect.