SRAM PFET and NFET super FIN characterization

Thursday, November 9, 2017: 11:30 AM
Ballroom A (Pasadena Convention Center)
Dr. Yong Wei , GLOBALFOUNDRIES Inc., Malta, NY
Dr. Frieder Baumann , GLOBALFOUNDRIES Inc., Malta, NY
Mr. Steve Lucarini , GLOBALFOUNDRIES Inc., Malta, NY
Dr. Zhigang Song , GLOBALFOUNDRIES, Hopewell Junction, NY
Dr. Ahmad Katnani , GLOBALFOUNDRIES Inc., Hopewell Junction, NY


We report on how to take the advantage of complex analysis techniques in the root-cause searching of a fin related device failure. Scanning electron microscopy (SEM), plan-view and cross-section transmission electron microscopy (TEM) with energy dispersive X-ray spectroscopy (EDX), electron energy loss spectroscopy (EELS) and tomography are applied in the case study of a fin defect.