Conductive-AFM for Failure Analysis of Parametric Test Structures in Advanced Technology Development
Conductive-AFM for Failure Analysis of Parametric Test Structures in Advanced Technology Development
Thursday, November 9, 2017: 10:40 AM
Ballroom A (Pasadena Convention Center)
Summary:
Failure analysis at advanced technology nodes is becoming more and more challenging. New FA techniques need to be explored to achieve fast learning cycles during advanced technology development. This paper demonstrated Conductive-AFM technique as a powerful solution for delivering fast and accurate root-cause analysis of parametric test structures at advanced technology nodes.
Failure analysis at advanced technology nodes is becoming more and more challenging. New FA techniques need to be explored to achieve fast learning cycles during advanced technology development. This paper demonstrated Conductive-AFM technique as a powerful solution for delivering fast and accurate root-cause analysis of parametric test structures at advanced technology nodes.