In-line Electron Beam Inspection of high aspect-ratio RMG FINFET gate
Wednesday, November 8, 2017: 4:20 PM
Ballroom C (Pasadena Convention Center)
Mr. Richard Hafer
,
GLOBALFOUNDRIES, Hopewell Junction, NY
Dr. Oliver D. Patterson
,
GLOBALFOUNDRIES, Hopewell Junction, NY
Cathy Gow
,
GLOBALFOUNDRIES, Hopewell Junction, NY
Derek McKindles
,
GLOBALFOUNDRIES, Hopewell Junction, NY
Brian Yueh-Ling Hsieh
,
Hermes Microvision Inc, San Jose, CA
Mr. Xiaohu Tang
,
Hermes Microvision Inc, San Jose, CA
