EBIC on TEM lamellae for improved failure localization and root cause understanding

Tuesday, November 7, 2017: 3:40 PM
Ballroom A (Pasadena Convention Center)
Dr. Frederic Lorut , STMicroelectronics, Crolles, France
Mr. P. Larre , STMicroelectronics, Crolles, France
Mrs. Céline Borowiak , STMicroelectronics, Crolles, France
Mr. Romain Bon , STMicroelectronics, Crolles, France

See more of: Nanoprobing and Electrical Characterization II
See more of: Technical Program