STUDENT PAPER: Optical Investigations of Temperature Effects in 14/16 nm FinFETs
STUDENT PAPER: Optical Investigations of Temperature Effects in 14/16 nm FinFETs
Monday, November 6, 2017: 10:55 AM
Ballroom D (Pasadena Convention Center)
Summary:
This publications gives a detailed analysis of spectral photon emission phenomena on finfets(including electron temperatures and thermal kink). InGaAs detector and optical system were fully calibrated. Furthermore we introduce a new method fo the detection of self-heating effects in FETs using EOFM.
This publications gives a detailed analysis of spectral photon emission phenomena on finfets(including electron temperatures and thermal kink). InGaAs detector and optical system were fully calibrated. Furthermore we introduce a new method fo the detection of self-heating effects in FETs using EOFM.