Automated Energy Dispersive X-ray Spectroscopy (EDS) for Metrology on Semiconductor Devices

Wednesday, November 8, 2017: 4:45 PM
Ballroom C (Pasadena Convention Center)
Dr. Justin Roller , ThermoFisher Scientific (formerly FEI), Hillsboro, OR
Dr. Zhenxin Zhong , ThermoFisher Scientific (formerly FEI), Hillsboro, OR
Mr. Michael Strauss , ThermoFisher Scientific (formerly FEI), Hillsboro, OR
Oleksii Bidiuk , ThermoFisher Scientific (formerly FEI), Eindhnoven, Netherlands
Mr. Jeff Blackwood , Thermo Fisher Scientific, Hillsboro, OR
Dr. Martin Verheijen , ThermoFisher Scientific (formerly FEI), Eindhnoven, Netherlands
Dr. Ozan Ugurlu , ThermoFisher Scientific (formerly FEI), Hillsboro, OR
Jason Donald , ThermoFisher Scientific (formerly FEI), Hillsboro, OR

See more of: Microscopy II
See more of: Technical Program