A review of junction defect isolation methods

Thursday, November 9, 2017: 9:50 AM
Ballroom A (Pasadena Convention Center)
Mr. Gregory M. Johnson , GLOBALFOUNDRIES, Hopewell Junction, NY
Mr. Christopher D'Aleo , GLOBALFOUNDRIES, Hopewell Junction, NY
Mr. Jocho Nxumalo , GLOBALFOUNDRIES, Hopewell Junction, NY
Mr. Brian Yates , GLOBALFOUNDRIES, Hopewell Junction, NY
Mr. Zaheer Khan , GLOBALFOUNDRIES, Hopewell Junction, NY
Mr. Christopher Molella , GLOBALFOUNDRIES, Hopewell Junction, NY

Summary:

We compare the utility of five different localization techniques in imaging junction health variations.
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