Further inquiry into Xe+ as primary ion species for Circuit Edit application

Thursday, November 9, 2017: 3:10 PM
Ballroom C (Pasadena Convention Center)
Mr. Valery Ray , PBST, MEO Engineering Co., Inc., Methuen, MA
Dr. Ali Hadjikhani, PhD , University of Connecticut, REFINE Lab, Storrs, CT
Mr. Joseph Favata , University of Connecticut, REFINE Lab, Storrs, CT
Ms. Bahar Ahmadi , University of Connecticut, REFINE Lab, Storrs, CT
Dr. Sina Shahbazmohamadi, PhD , University of Connecticut, REFINE Lab, Storrs, CT

Summary:

Commercially availability of Xe P-FIB instruments enabled evaluating suitability of Xe as potential candidates for primary ion species in FIB Circuit Edit application. While PFIB source and column technologies should improve considerably, multiple properties of Xe ion species are promising for Circuit Edit application. Results of experimental evaluation of Xe beam properties pertaining to Circuit Edit application and semiconductor materials would be discussed.
See more of: FIB Circuit Analysis and Edit
See more of: Technical Program