Measurement of Dielectric constant and Doping Concentration of a Cross-sectioned Device by Quantitative Scanning Microwave Impedance Microscopy
Measurement of Dielectric constant and Doping Concentration of a Cross-sectioned Device by Quantitative Scanning Microwave Impedance Microscopy
Tuesday, November 7, 2017: 1:45 PM
Ballroom A (Pasadena Convention Center)