Scanning Probe Analysis

Tuesday, November 7, 2017: 1:20 PM-3:00 PM
Ballroom A (Pasadena Convention Center)
Mr. Jocho Nxumalo, Globalfoundries and Mr. Phil Kaszuba, Globalfoundries
1:45 PM
Measurement of Dielectric constant and Doping Concentration of a Cross-sectioned Device by Quantitative Scanning Microwave Impedance Microscopy
Mr. Oskar Amster, PrimeNano, Inc.; Dr. Stuart L friedman, PrimeNano, Inc.; Dr. Yongliang Yang, PrimeNano, Inc.; Dr. Dorai Iyer, ON Semiconductor; Mr. Rod Crowder, ON Semiconductor; Dr. Fred Stanke, PrimeNano, Inc.; Mr. Aaron Messinger, ON Semiconductor; Dr. Yongxia Zhang, ON Semiconductor
2:10 PM
Fault Isolation of MOL and FEOL Buried Defects Using Conductive Atomic Force Microscopy as a Complement to Passive Voltage Contrast Imaging
Dr. Lucile C. Teague Sheridan, Ph.D., GLOBALFOUNDRIES Inc.; Ms. Linda Conohan, GLOBALFOUNDRIES Inc.; Mr. Chong Khiam Oh, GLOBALFOUNDRIES Inc.
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