44th International Symposium for Testing and Failure Analysis (Oct. 28 - Nov. 1, 2018): https://www.asminternational.org/web/istfa-2018/home

44th International Symposium for Testing and Failure Analysis (Oct. 28 - Nov. 1, 2018)
October 28 - November 01, 2018

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Dr. Matthias Kemmler

Kleindiek Nanotechnik
Reutlingen Germany 72770

Papers:

Integration of Probing Capability into Plasma FIB for In-Situ Delayering, Defect Inspection, and EBAC on BEOL Defects of sub-20nm FINFET Devices

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General Information

October 28 - November 01, 2018


Phoenix, AZ