44th International Symposium for Testing and Failure Analysis (Oct. 28 - Nov. 1, 2018)
October 28 - November 01, 2018
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Dr. Jochonia Nxumalo
GLOBALFOUNDRIES Inc.
Malta, NY
USA 12020
Papers:
Conductive-AFM for Inline Voltage Contrast Defect Characterization at Advanced Technology Nodes