Conductive-AFM for Inline Voltage Contrast Defect Characterization at Advanced Technology Nodes
Conductive-AFM for Inline Voltage Contrast Defect Characterization at Advanced Technology Nodes
Monday, October 29, 2018: 3:50 PM
226BC (Phoenix Convention Center)
Summary:
This paper demonstrated a methodology of electrically validation, isolation, and characterization of inline EBI voltage contrast defects using conductive-atomic force microscopy technique. This methodology offers opportunities for faster understanding of failure mechanism and thus enables accelerated yield learning.
This paper demonstrated a methodology of electrically validation, isolation, and characterization of inline EBI voltage contrast defects using conductive-atomic force microscopy technique. This methodology offers opportunities for faster understanding of failure mechanism and thus enables accelerated yield learning.