Contamination Troubleshooting Approach from Problem to Solution

Wednesday, November 13, 2019
Exhibit Hall D (Oregon Convention Center)
Dr. Victor Chia , Air Liquide, Fremont, CA
Dr. Hugh Gotts , Air Liquide, Fremont, CA
Dr. Fuhe Li , Air Liquide, Fremont, CA
Dr. Mark Camenzind , Air Liquide, Fremont, CA

Summary:

Studies conclude contamination is a major cause of product defects and product rejects. This presentation discusses the principle of contamination troubleshooting to determine the root cause and source and a metrology decision tree to characterize the contamination. Case studies will be presented.