2D Carrier Density Mapping of SiC Power MOSFET using SNDM-dC/dV and dC/dz Imaging

Wednesday, November 13, 2019
Exhibit Hall D (Oregon Convention Center)
Dr. Jing-Jiang Yu , Hitachi High Technologies America, Inc., Clarksburg, MD
Dr. Takehiro Yamaoka , Hitachi High-Technologies, Kawasaki, Japan
Mr. Toru Aiso , Hitachi High-Technologies, Kawasaki, Japan
Mr. Kazutoshi Watanabe , Hitachi High-Tech Science Corporation, Suntogun, Japan
Mr. Yoshiteru Shikakura , Hitachi High-Tech Science Corporation, Suntogun, Japan
Mr. Shinya Kudo , Hitachi High-Tech Science Corporation, Suntogun, Japan
Mr. Keita Tamura , Hitachi High-Technologies, Tokyo, Japan
Mr. Katsunori Mizuguchi , Hitachi High-Technologies, Tokyo, Japan