Comparison of He+ and Ga+ voltage contrast in N-wells

Wednesday, November 13, 2019: 5:20 PM
D 137/138 (Oregon Convention Center)
Mr. Gregory Johnson , Carl Zeiss SMT, Inc., Peabody, MA
Dr. Ted Lundquist , Carl Zeiss X-Ray Microscopy, Inc., Pleasanton, CA
David Ferranti , Carl Zeiss Microscopy, LLC, Peabody, MA
Dr. Baohua Niu , Carl Zeiss SMT, Inc., Peabody, MA
Dr. John Notte , Carl Zeiss Microscopy SMT, Peabody, MA

Summary:

This work compares the effectiveness of He+ and Ge+ beams in the imaging and overlay analysis of N-well boundaries at various depths of shallow trench oxide. A theoretical basis is given.
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