Failure analysis of FinFET circuitry at GHz speeds using voltage-contrast and stroboscopic techniques on a scanning electron microscope

Wednesday, November 13, 2019: 4:55 PM
D 137/138 (Oregon Convention Center)
Dr. James S. Vickers , THERMO FISHER SCIENTIFIC, Fremont, CA
Dr. Seema Somani , Thermo Fisher Scientific, Fremont, CA
Dr. Blake M. Freeman , Thermo Fisher Scientific, Fremont, CA
Mr. Peter Carleson , FEI Company, Hillsboro, OR
Mr. Lubomír Tůma , Thermo Fisher Scientific, Fremont, CA
Mr. Marek Unčovský , Thermo Fisher Scientific, Fremont, CA
Mr. Petr Hlavenka , Thermo Fisher Scientific, Fremont, CA

Summary:

We present results using stroboscopic e-beam techniques with a scanning electron microscope to measure electrical waveforms above 1 GHz
See more of: Fault Isolation II
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