The Potential of Inline Automated Defect Review of Mechanical Property and Electrical Characterization by AFM
The Potential of Inline Automated Defect Review of Mechanical Property and Electrical Characterization by AFM
Wednesday, November 13, 2019
Exhibit Hall D (Oregon Convention Center)
Summary:
It is well known that AFM can measure not only surface morphology but also mechanical and electrical properties. However, the versatility of AFM is not fully utilized in industrial applications due to the various limitations. The potential of inline AFM automated defect review process will be introduced with solutions and examples.
It is well known that AFM can measure not only surface morphology but also mechanical and electrical properties. However, the versatility of AFM is not fully utilized in industrial applications due to the various limitations. The potential of inline AFM automated defect review process will be introduced with solutions and examples.