Automated gas-enhanced PFIB surface preparation enabled metrology and statistical analysis of 3D NAND devices

Tuesday, November 12, 2019: 2:15 PM
F 150/151 (Oregon Convention Center)
Mr. Christopher Hakala , Thermo Fisher Scientific, Hillsboro, OR
James Clarke , Thermo Fisher Scientific, Hillsboro, OR
Mark Biedrzycki , Thermo Fisher Scientific, Hillsboro, OR
Ms. Kesley R. Price , Thermo Fisher Scientific, Hillsboro, OR
Jamie A. Johnson , Thermo Fisher Scientific, Hillsboro, OR
Dr. Gavin A Mitchson, Ph.D. , Thermo Fisher Scientific, Hillsboro, OR

Summary:

The presented developments will demonstrate to the community a process which can automatically delayer and analyze 3D NAND on any desired layer.
See more of: FIB Sample Preparation
See more of: Technical Program