FIB Sample Preparation

Tuesday, November 12, 2019: 1:00 PM-2:40 PM
F 150/151 (Oregon Convention Center)
Dr. Bryan Tracy, PhD, Evans Analytical Group and Jake Jensen, Thermo Fisher Scientific
1:00 PM
Against Ion Beam Impact by Applying the Significant Protection Layer on Double Ex situ Lift-out TEM specimen
Dr. Chun-Hung Lin, Macronix International Co., Ltd.; Dr. Hsin-Cheng Hsu, Macronix International Co., Ltd.; Mr. Tsung-Yi Lin, Macronix International Co., Ltd.; Mrs. Ru-Hui Lin, Macronix International Co., Ltd.; Mr. I-An Chen, Macronix International Co., Ltd.; Mrs. Pei-Lin Hsu, Macronix International Co., Ltd.; Mr. Chao-Kun Chen, Macronix International Co., Ltd.; Ms. Iris Hsieh, Macronix International Co., Ltd.; Mr. Chin-Chih Yeh, Macronix International Co., Ltd.; Mr. Nan-Tzu Lian, Macronix International Co., Ltd.; Mr. Ta-Hone Yang, Macronix International Co., Ltd.; Mr. Kuang-Chao Chen, Macronix International Co., Ltd.
1:25 PM
Variable angle TEM grid holder for advanced TEM lamellae preparation
Dr. Tomas Hrncir, TESCAN Brno s.r.o.; Mr. Marek Sikula, TESCAN Brno s.r.o.; Dr. Pavel Dolezel, TESCAN Brno s.r.o.; Dr. Claudio A. G. Savoia, STmicroelectronics
1:50 PM
Optimisation of large chunk lift-out method and lamella preparation for CBED measurements using Xenon Plasma FIB
Mr. Miloš Hrabovský, TESCAN Brno; Mr. Tomáš Morávek, TESCAN Brno; Mr. Chandran Narendraraj, TESCAN Brno; Mr. Jürgen Gluch, Fraunhofer IKTS; Mr. Uwe Mühle, TU Dresden; Prof. Ehrenfried Zschech, Fraunhofer IKTS
2:15 PM
Automated gas-enhanced PFIB surface preparation enabled metrology and statistical analysis of 3D NAND devices
Mr. Christopher Hakala, Thermo Fisher Scientific; James Clarke, Thermo Fisher Scientific; Mark Biedrzycki, Thermo Fisher Scientific; Ms. Kesley R. Price, Thermo Fisher Scientific; Jamie A. Johnson, Thermo Fisher Scientific; Dr. Gavin A Mitchson, Ph.D., Thermo Fisher Scientific
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