Super XHR Cross-Sectional SEM Imaging & EDS Analysis: A Systematic Method for High-Fidelity Microstructure Characterization of Dense SRAM FinFET Structures

Wednesday, November 13, 2019
Exhibit Hall D (Oregon Convention Center)
Mr. Zdenek Kral , Thermo Fisher Scientific, Hillsboro, OR
Mr. Jake Jensen , Thermo Fisher Scientific, Hillsboro, OR
Mrs. Lisa McGill , Thermo Fisher Scientific, Hillsboro, OR
Mr. Trevan Landin , Thermo Fisher Scientific, Hillsboro, OR
Mr. Stephen M. Seddio , Thermo Fisher Scientific, Madison, WI
Mr. Chris Stephens , Thermo Fisher Scientific, Madison, WI
Mr. Roger Alvis , Thermo Fisher Scientific, Hillsboro, OR

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