Carrier Profiling of the 10-nm-Order Structure in a 3D Flash Memory Cell Using Scanning Nonlinear Dielectric Microscopy

Thursday, November 14, 2019: 11:15 AM
F 150/151 (Oregon Convention Center)
Mr. Jun Hirota , KIOXIA Corporation, Yokkaichi, Japan
Dr. Ken Hoshino , KIOXIA Corporation, Yokkaichi, Japan
Dr. Tsukasa Nakai , KIOXIA Corporation, Yokkaichi, Japan
Prof. Kohei Yamasue , Tohoku University, Sendai, Japan
Prof. Yasuo Cho , Tohoku University, Sendai, Japan

See more of: Scanning Probe Analysis
See more of: Technical Program