Scanning Probe Analysis

Thursday, November 14, 2019: 10:25 AM-12:05 PM
F 150/151 (Oregon Convention Center)
Dr. Pai Tangyunyong, Sandia National Labs and Mr. Phil Kaszuba, Globalfoundries
10:25 AM
A novel method of fabrication of metal probes for scanning probe microscopy
Mr. Michał Milczarek, Institute of Fundamental Technological Research, Polish Academy of Sciences; Dr. Dariusz M. Jarząbek, Institute of Fundamental Technological Research, Polish Academy of Sciences
10:50 AM
Scanning Capacitance Microscopy and Spectroscopy for Root Cause Analysis on Location Specific Individual FinFET Devices
Mr. Phil Kaszuba, Globalfoundries; Mr. Leon Moszkowicz, Globalfoundries; Mr. Randall Wells, Globalfoundries
11:15 AM
Carrier Profiling of the 10-nm-Order Structure in a 3D Flash Memory Cell Using Scanning Nonlinear Dielectric Microscopy
Mr. Jun Hirota, KIOXIA Corporation; Dr. Ken Hoshino, KIOXIA Corporation; Dr. Tsukasa Nakai, KIOXIA Corporation; Prof. Kohei Yamasue, Tohoku University; Prof. Yasuo Cho, Tohoku University
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