Characterization of 16nm logic devices at ultra-low voltage with enhanced material contrast

Thursday, November 14, 2019: 9:00 AM
D 137/138 (Oregon Convention Center)
Mr. Daniel Fischer , Carl Zeiss SMT GmbH, Oberkochen, ME, Germany
Dr. Si Ping Zhao , Carl Zeiss Pte Ltd, Singapore, Singapore
Dr. Yongkai Zhou , Carl Zeiss Pte Ltd, Singapore, Singapore
Ingo Schulmeyer , Carl Zeiss SMS Ltd., Misgav, Israel

See more of: Invited Paper - Characterization of 16nm Logic Devices at Ultra-Low Voltage with Enhanced Material Contrast
See more of: Technical Program