Invited Paper - Characterization of 16nm Logic Devices at Ultra-Low Voltage with Enhanced Material Contrast

Thursday, November 14, 2019: 9:00 AM-9:25 AM

D 137/138 (Oregon Convention Center)

9:00 AM

Characterization of 16nm logic devices at ultra-low voltage with enhanced material contrast
Mr. Daniel Fischer, Carl Zeiss SMT GmbH; Dr. Si Ping Zhao, Carl Zeiss Pte Ltd; Dr. Yongkai Zhou, Carl Zeiss Pte Ltd; Ingo Schulmeyer, Carl Zeiss SMS Ltd.

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