(V) Photon Emission Microscopy of HfO2 ReRAM Cells

Monday, November 1, 2021: 11:50 AM
West 301 A (Phoenix Convention Center)
Dr. Franco Stellari , IBM, Yorktown Heights, NY
N/A Ernest wu , IBM Research, Essex Junction, VT
Dr. Takashi Ando , IBM Research, Yorktown Heights, NY
Dr. Martin Frank , IBM Research, Yorktown Heights, NY
Dr. Peilin Song , IBM T.J. Watson Research Center, Yorktown Heights, NY

Summary:

In this paper, we discuss the use of spontaneous Photon Emission Microscopy (PEM) for observing filaments formed in HfO2 Resistive Random Access Memory (ReRAM) cells. A CCD and an InGaAs camera can be used to quickly observe photon emission in both reverse (reset) and forward (set) bias conditions. An electric field model and a uniform Poisson spatial distribution model are used to explain the intensity and location of the experimental data. Single filament fluctuations and multiple filaments are also observed for the first time.