Advances in Scanning Microwave Impedance Microscopy
Advances in Scanning Microwave Impedance Microscopy
Monday, November 1, 2021: 1:30 PM
105 AB (Phoenix Convention Center)
Summary:
Scanning Microwave Impedance microscopy (sMIM) is a new and powerful electrical AFM based technique. sMIM can be used to look at variations in the dopant concentration at nanometer scale. This is a valuable technique in the FA domain to investigate and localize device failures.
Scanning Microwave Impedance microscopy (sMIM) is a new and powerful electrical AFM based technique. sMIM can be used to look at variations in the dopant concentration at nanometer scale. This is a valuable technique in the FA domain to investigate and localize device failures.