Vector Magnetic Current Imaging of an 8 nm Process Node Chip and 3D Current Distributions Using the Quantum Diamond Microscope

Monday, November 1, 2021: 11:00 AM
West 301 A (Phoenix Convention Center)
Dr. Sean M. Oliver , The MITRE Corporation, McLean, VA, University of Maryland, College Park, MD
Dr. Dmitro J. Martynowych , The MITRE Corporation, McLean, VA
Dr. Matthew J. Turner , University of Maryland, College Park, MD, University of Maryland, College Park, MD, University of Maryland, College Park, MD
Dr. David A. Hopper , The MITRE Corporation, McLean, VA
Prof. Ronald L. Walsworth , University of Maryland, College Park, MD, University of Maryland, College Park, MD, University of Maryland, College Park, MD
Dr. Edlyn V. Levine , Harvard University, Cambridge, MA, The MITRE Corporation, McLean, VA

Summary:

We develop a new magnetic field imaging tool called the quantum diamond microscope, present the first measurements of shorts and leakages in microelectronics using this technique, and show our progress into providing 3D current density maps via magnetic field inversion.
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