47th International Symposium for Testing and Failure Analysis (Oct. 31 - Nov. 4, 2021)
October 31 - November 04, 2021
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Mr. Tsung-Yi Lin
Macronix International Co., Ltd.
Hsin-chu Taiwan 300
Papers:
(V) Plasma Etching Pre-treatment for a TEM Lamella Preparation of 3D NAND with High Aspect Ratio
