Black Mushroom Formation on Aluminum Bond Pad

Wednesday, November 2, 2022: 10:25 AM
Ballroom B (Pasadena Convention Center)
Dr. Yong Guo , Samsung Austin Semiconductor, LLC, Austin, TX

Summary:

Experimental tests were carried out to induce the Al pad corrosion. Optical imaging revealed Black Mushroom (BM) nucleated at Al grain boundaries. BMs were found all to be composed of O, F, and Al. BMs were shown to have separations of F-rich region and O-rich region. In addition, BMs were composed of small crystallites and were porous. A moisture (H2O) involved cyclic chemical reaction incorporating these analyses has been formulated. Factors to prevent BM formation were discussed.