PFIB Delayering– Nanoprobing Workflow on 5nm FinFET device
PFIB Delayering– Nanoprobing Workflow on 5nm FinFET device
Thursday, November 3, 2022: 4:20 PM
Ballroom B (Pasadena Convention Center)
Summary:
This paper discusses the relationship between Nanoprobing sample preparation method on 5nm SRAM array by PFIB and transistor characteristic change by Ion beam sample preparation. which is called PFIB delayering – Nanoprobing Workflow.
This paper discusses the relationship between Nanoprobing sample preparation method on 5nm SRAM array by PFIB and transistor characteristic change by Ion beam sample preparation. which is called PFIB delayering – Nanoprobing Workflow.