Nanoprobing & Electrical Characterization

Thursday, November 3, 2022: 3:05 PM-4:45 PM
Ballroom B (Pasadena Convention Center)
Mr. David Albert, IBM (Retired) and Mr. John Sanders, Thermofisher
3:05 PM
Impact of PFIB Gas Assisted Delayering on MOSFET Degradation
Mr. Zvika Sapir, Intel; Mrs. Oksana Dimnich, Intel; Dr. Avraham Raz, Intel
3:30 PM
Strategies to identify physical origin of contrast in EBIRCH
Dr. Grigore Moldovan, point electronic GmbH; Mr. William Courbat, Imina Technologies SA
3:55 PM
Zero channel bias determination of device turn-on and the Seebeck effect in nanoprobing
Mr. Greg Johnson, ZEISS Microscopy; Andreas Rummel, Kleindiek Nanotechnik; Dr. Heiko Stegmann, Carl Zeiss Microscopy GmbH
4:20 PM
PFIB Delayering– Nanoprobing Workflow on 5nm FinFET device
Mrs. Hayoung Choi, Thermo Fisher Scentific; Mr. William Lowe, Thermofisher Scientific; Dr. Christopher H. Kang, Thermo Fisher Scientific
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