CASE STUDIES: DEVICE ANALYSIS - The Impact of Ambient Humidity on the Surface Conductance of SiNx Films for Application in Capacitive MEMS Switches

Wednesday, November 2, 2022

Exhibit Halls A & B (Pasadena Convention Center)

Mr. Dimitris Birmpiliotis , National and Kapodistrian University of Athens (NKUA), Athens, Greece

Prof. George Papaioannou , University of Athens, Athens, Greece