Large field of view and artifact-free plan view TEM specimen preparation by post-FIB Ar milling
Large field of view and artifact-free plan view TEM specimen preparation by post-FIB Ar milling
Monday, October 31, 2022: 3:55 PM
Ballroom B (Pasadena Convention Center)
Summary:
This work presents post-FIB Ar milling of plan view TEM specimens. The presented approach omits mechanical polishing or adding a protective block prior to FIB preparation of plan view specimens. The controlled and reproducible Ar milling technique results to artifact-free with large field of view plan view TEM specimens.
This work presents post-FIB Ar milling of plan view TEM specimens. The presented approach omits mechanical polishing or adding a protective block prior to FIB preparation of plan view specimens. The controlled and reproducible Ar milling technique results to artifact-free with large field of view plan view TEM specimens.