FIB Sample Preparation

Monday, October 31, 2022: 2:20 PM-5:10 PM
Ballroom B (Pasadena Convention Center)
* FIB prep for SEM/TEM
* FIB related artefacts
* Mulit-ion Source Plasma-FIB
Mr. Antonio Tollis, Analog Devices and Ms. Valerie Brogden, University of Oregon
2:20 PM
Comparing Behaviors of FIB Toolsets in a Large Scale Automated XTEM Sample Preparation Setup
Dr. Vikas Dixit, Intel Corporation; Dr. Yilhwan You, Intel Corporation; Dr. Bryan D Gauntt, Intel Corporation; Dr. Taehun Lee, Intel Corporation; Dr. Hyun Woo Shim, Intel Corporation
2:45 PM
Automated TEM Lamella Preparation using Remote CAD to SEM Alignment
Dr. Hyun Woo Shim, Intel Corporation; Dr. Taehun Lee, Intel Corporation; Dr. Jonghan Kwon, Intel Corporation
3:30 PM
New Approach in Physical Failure Analysis Based on 3D Reconstruction
Dr. Domenico Mello, STMicroelectronics; Dr. Heiko Stegmann, Carl Zeiss Microscopy GmbH; Mr. Giuseppe Sciuto, STMicroelectronics; Mr. Massimiliano Astuto, STMicroelectronics; Dr. Maria Francesca Santangelo, STMicroelectronics; Dr. Flavio Cognigni, Sapienza University of Rome, Italy, Sapienza University of Rome, Italy; Prof. Marco Rossi, Sapienza University of Rome, Italy
3:55 PM
Large field of view and artifact-free plan view TEM specimen preparation by post-FIB Ar milling
Dr. Cecile S. Bonifacio, E.A. Fischione Instruments, Inc.; Mr. Richard Li, E.A. Fischione Instruments, Inc.; Dr. Pawel Nowakowski, E.A. Fischione Instruments, Inc.; Ms. Mary Ray, E.A. Fischione Instruments, Inc.; Mr. Paul Fischione, E.A. Fischione Instruments, Inc.
4:20 PM
Complete in-situ workflows of failure analysis and defect localization using a state-of-the-art FIB/SEM microscope
Dr. Adam W Stokes, Thermo Fisher Scientific; Mr. Libor Strakos, Thermo Fisher Scientific; Mr. Trevan Landin, Thermo Fisher Scientific
4:45 PM
Develop a Time Efficient Method to Enhance the FIB Process on Die Backside Metallization (BSM) Analysis
Ms. Chea Wee Lo, Infineon Technologies (Malaysia) Sdn Bhd; Mr. Sze Yee Tan, Infineon Technologies (Malaysia) Sdn Bhd; Ms. Pei Hoon Ong, Infineon Technologies (Malaysia) Sdn Bhd
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