AFM in SEM for device characterization and defect localization
AFM in SEM for device characterization and defect localization
Thursday, November 3, 2022: 1:40 PM
Ballroom A (Pasadena Convention Center)
Summary:
A unique method for semiconductor characterization involving AFM in SEM system is described. Results are shown demonstrating the ability of SEM exposure combined with use of appropriate AFM tips to prepare a clean surface for SRAM characterization. A second example is described showing well EBAC.
A unique method for semiconductor characterization involving AFM in SEM system is described. Results are shown demonstrating the ability of SEM exposure combined with use of appropriate AFM tips to prepare a clean surface for SRAM characterization. A second example is described showing well EBAC.