Investigation of Thermal Laser Stimulation (TLS) Effects on 7nm FinFET Transistor Parameters

Thursday, November 3, 2022: 3:20 PM
Ballroom A (Pasadena Convention Center)
Mr. Johns Oarethu , IBM, Hopewell Junction, NY
Dr. Zhigang Song , IBM, Hopewell Junction, NY
Mr. Stephen Wu , IBM, Hopewell Junction, NY
Mr. Phong Tran , IBM, Hopewell Junction, NY
Mr. Michael Tenney , IBM, Hopewell Junction, NY
Mr. Richard Oldrey , IBM - STG-MD, Hopewell Junction, NY

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