Overcoming challenging Failure Analysis sample types on a single IR/Raman platform!

Thursday, November 3, 2022: 11:00 AM
Ballroom B (Pasadena Convention Center)
Mr. Jay Anderson , Photothermal Spectroscopy Corp., Santa Barbara, CA
Dr. Michael K. Lo, PhD , Photothermal Spectroscopy Corp., Santa Barbara, CA
Dr. Eoghan Dillon, PhD , Photothermal Spectroscopy Corp., Santa Barbara, CA
Dr. Mustafa Kansiz, PhD , Light Light Solutions, Athens, GA

Summary:

A long-standing industrial problem is measuring the conductive interlayers in CMP microelectronics
See more of: Microscopy and Material Analysis I
See more of: Technical Program