MICROSCOPY AND MATERIAL ANALYSIS - AKONIS: SIMS Excellence Brought To The Fab
MICROSCOPY AND MATERIAL ANALYSIS - AKONIS: SIMS Excellence Brought To The Fab
Wednesday, November 2, 2022
Exhibit Halls A & B (Pasadena Convention Center)
Summary:
The new CAMECA AKONIS SIMS tool fills a critical gap in semiconductor fabrication processes by providing high throughput, high precision detection for implant profiles, composition analysis and interfacial data directly in the semiconductor manufacturing line. AKONIS provides a very high level of automation to ensure repeatability across tools for fab level process control and tool-to-tool matching
The new CAMECA AKONIS SIMS tool fills a critical gap in semiconductor fabrication processes by providing high throughput, high precision detection for implant profiles, composition analysis and interfacial data directly in the semiconductor manufacturing line. AKONIS provides a very high level of automation to ensure repeatability across tools for fab level process control and tool-to-tool matching
See more of: Exhibitor Dessert Reception, Poster Session and Video Contest
See more of: Technical Program
See more of: Technical Program