Top-down microelectronic device delayering work flow: Nanometer-scale uniformity over a millimeter-scale area

Wednesday, November 15, 2023: 8:40 AM

103 A-B (Phoenix Convention Center)

Dr. Pawel Nowakowski , E.A. Fischione Instruments, Inc., Export, PA

Mr. Junhai Liu , E.A. Fischione Instruments, Inc., Export, PA

Dr. Cecile S. Bonifacio , E.A. Fischione Instruments, Inc., Export, PA

Dr. Richard Li , E.A. Fischione Instruments, Inc., Export, PA

Ms. Mary Ray , E.A. Fischione Instruments, Inc., Export, PA

Mr. Paul Fischione , E.A. Fischione Instruments, Inc., Export, PA