Phase Segmentation in a Superjunction MOSFET using FIB-SEM tomography and 3D EDX

Mr. Flavio Cognigni , Sapienza University of Rome, Rome, Rome, Italy
Dr. Heiko Stegmann , Carl Zeiss Microscopy GmbH, Oberkochen, Germany
Dr. Domenico Mello , STMicroelectronics, Catania, Catania, Italy

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