49th International Symposium for Testing and Failure Analysis (Nov. 12 – Nov. 16, 2023)
November 12 - 16, 2023
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Mr. David Taraci
Carl Zeiss Microscopy
X-ray Microscopy
Pleasanton, CA
USA 94588
Papers:
Detecting Wafer Level Cu Pillar Defects Using Advanced 3D X-ray Microscopy (XRM) with Submicron Resolution
