Revolutionizing Failure Analysis: EBAC Nanoprobing Analysis Insights into Inaccessible Floating Gates of Advanced Tech Node Automotive NVMs

Summary:

This study focuses on the failure analysis (FA) of split-gate NVM memory, which dominates the landscape of embedded NVMs in advanced processes. Presenting a novel approach utilizing nanoprobe techniques on non-accessible floating gates (FG) of NVMs, we aim to detect leakage pathways through electron beam absorb current (EBAC) analysis. Through comprehensive experimental analysis and case studies, we demonstrate the efficacy of electrical nanoprobing and innovative sample preparation techniques in understanding the mechanisms behind program and data retention failures in NVMs. Our study underscores the significance of precise delayering techniques and identifies potential avenues for future exploration in failure analysis methodologies.