Simultaneous Thermomechanical Mapping via Optical Pumping for Subsurface Defect Identification

Tuesday, October 29, 2024: 3:00 PM
202 (Hilton San Diego Bayfront)
Dr. Amun Jarzembski , Sandia National Laboratories, Albuquerque, NM
Dr. Wyatt Hodges , Sandia National Laboratories, Albuquerque, NM
Dr. Aleem Siddiqui , Sandia National Laboratories, Albuquerque, NM
Matthew Bahr , Sandia National Laboratories, Albuquerque, NM
Dr. Luke Yates , Sandia National Laboratories, Albuquerque, NM
Dr. Greg Pickrell , Sandia National Laboratories, Albuquerque, NM

Summary:

We demonstrate thermo-mechancial heating response (T-MeHR) which combines frequency domain thermoreflectance (FDTR) with a short-wave interferometer (SWIR) enabling simultaneous thermomechanical mapping via optical pumping of buried interfacial defects in a silicon-silicon (Si-Si) direct bonded sample.
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