EBIC at Cross-Section
EBIC at Cross-Section
Tuesday, October 29, 2024: 2:20 PM
204 (Hilton San Diego Bayfront)
Summary:
Electron-beam-induced Current (EBIC) is a technique based on a scanning electron beam (SEM) nanoprobe system which has gained extensive attention in recent years. Beyond the top-down approach, the EBIC method, when applied at the device cross-section, is able to reveal junction profile directly visualizing changes in the depletion region under different bias conditions. In this paper, we presented a compilation of our work over recent years based on this technique.
Electron-beam-induced Current (EBIC) is a technique based on a scanning electron beam (SEM) nanoprobe system which has gained extensive attention in recent years. Beyond the top-down approach, the EBIC method, when applied at the device cross-section, is able to reveal junction profile directly visualizing changes in the depletion region under different bias conditions. In this paper, we presented a compilation of our work over recent years based on this technique.