Cross-Sectional Passive Voltage Contrast Technique on FinFET Metal-Gate Breakdown Defect Isolation and Visualization for TEM Analysis

Tuesday, October 29, 2024: 3:00 PM
204 (Hilton San Diego Bayfront)
Dr. S. L. Ting , Globalfoundries Singapore Pte Ltd., Singapore, Singapore, Singapore
Mr. P. K. Tan , Globalfoundries Singapore Pte Ltd., Singapore, Singapore, Singapore
Mr. P.T. Ng , Globalfoundries Singapore Pte Ltd., Singapore, Singapore, Singapore
Dr. C. Q. Chen , Globalfoundries Singapore Pte Ltd., Singapore, Singapore, Singapore

See more of: Sample Preparation and Device De-processing
See more of: Technical Program