Sample Preparation and Device De-processing

Tuesday, October 29, 2024: 3:00 PM-4:20 PM

204 (Hilton San Diego Bayfront)

Dr. Chris kang, Thermo Fisher Scientific and Ms. Rose Ring, Thermo Fisher

3:00 PM

Cross-Sectional Passive Voltage Contrast Technique on FinFET Metal-Gate Breakdown Defect Isolation and Visualization for TEM Analysis
Dr. S. L. Ting, Globalfoundries Singapore Pte Ltd.; Mr. P. K. Tan, Globalfoundries Singapore Pte Ltd.; Mr. P.T. Ng, Globalfoundries Singapore Pte Ltd.; Dr. C. Q. Chen, Globalfoundries Singapore Pte Ltd.

3:20 PM

Using FIB grooving to prepare top-down-nanoprobed sample for site-specific cross-sectional nanoprobing analysis
Dr. S. L. Ting, Globalfoundries Singapore Pte Ltd.; Mr. P. K. Tan, Globalfoundries Singapore Pte Ltd.; Ms. T. T. Yu, Globalfoundries Singapore Pte Ltd.; Mr. P.T. Ng, Globalfoundries Singapore Pte Ltd.; Dr. C. Q. Chen, Globalfoundries Singapore Pte Ltd.

3:40 PM

4:00 PM

Novel Backside IC preparation stopping on STI with full circuit functionality using Chemical Mechanical Polishing (CMP) with highly selective slurry
Dr. Norbert Herfurth, IHP - Leibniz Institute for High Performance Microelectronics; Dr. Gerfried Zwicker, zwickerconsult; Mr. Abdelkhalek Bouchtouq, IHP - Leibniz Institute for High Performance Microelectronics; Mr. Awwal A. Adesunkanmi, IHP - Leibniz Institute for High Performance Microelectronics; Prof. Christian Boit, Technische Universität Berlin

See more of: Technical Program