Flexible Application of Multi-Species Plasma-FIB in Failure Analysis Workflows

Wednesday, October 30, 2024: 11:20 AM

204 (Hilton San Diego Bayfront)

Ms. Melissa Mullen , Thermo Fisher Scientific, Hillsboro, OR

Dr. Adam Stokes , Thermo Fisher Scientific, Hillsboro, OR

Dr. Jared Johnson , Thermo Fisher Scientific, Hillsboro, OR

Mr. Andrew Lam , Thermo Fisher Scientific, Hillsboro, OR

Mr. Samuel Benson , Thermo Fisher Scientific, Hillsboro, OR

Summary:

We demonstrate the advantages of using multiple ion species for sample preparation of wide-bandgap material devices.